H-200

H-400

Gas Flow Control/Indication

O₂ MFC

O₂ MFC

Ozone Pressure Control

Manual

Manual

Ozone Concentration Control

Automatic

Automatic

Ozone Concentration Monitor

Standard (gas phase)

Standard (gas phase)

Maximum Ozone Output*

280 g/h @ 14% by weight

45 g/h @ 19% by weight

480 g/h @ 14% by weight

45 g/h @ 21% by weight

Weight (approximate)

440 kg

600 kg

Dimensions (L x W x H)

850 x 600 x 1900 mm

1000 x 600 x 1900 mm

Operating Range

Maximum total flow

30 l/min

100 l/min

Operation pressure

1.0 bar-gauge

1.0 bar-gauge

Ambient temperature

10-25℃

10-25℃

Control Interface

PLC & POD

PLC & POD

Facility Requirements

Oxygen gas

> 99.99% purity

> 99.99% purity

Oxygen inlet pressure

2 bar-gauge

2 bar-gauge

     Cooling water recommended flow

12 l/min

18 l/min

Cooling temperature

10℃

10℃

Power (50/60 Hz) service rating

Power consumption

230V, single phase, 40A

5.1 kW

230V, single phase, 60A

7.0 kW

Certified

SEMI S2/S8

SEMI S2/S8 

CE

CE

    PI Diagram

  Performance

                                              The purity of tested oxygen is 99.99%.